Light guiding member, light detecting device and defect inspecti

Details Light guiding member, light detecting device and defect inspecti Light guiding member, light detecting device and defect inspecti

1998-02-02

1999-09-14

Mancuso, Joseph

Image analysis

Applications

Manufacturing or product inspection

362551, G06K 900

Patent

active

059534451

ABSTRACT:
A defect inspecting apparatus for optically inspecting a defect of a subject to be inspected, includes: a first light guiding member having a first columnar light transmitting member including a first side surface and a second side surface facing the first side surface, curvature of the first side surface being smaller than that of the second side surface, and a first light scattering band having a definite width provided on the second side surface of the first columnar light transmitting member in a columnar axis direction. The first light guiding member enables a transmitted light or a reflected light of a light illuminated to the subject to be inspected from a light source to enter the first side surface, a part of the light incident on the first side surface to guide substantially to the columnar axis direction of the first light guiding member thereby to reach an end thereof, the other part of the light incident on the first side surface to emit from the second side surface. The defect inspecting apparatus further includes: a first light detecting means for detecting the light guided to the circular end of the first light guiding member; and a light detecting device for detecting the light emitted from the second side surface of the first light guiding member.

REFERENCES:
patent: 4116566 (1978-09-01), Sick
patent: 5243402 (1993-09-01), Weber et al.
patent: 5448350 (1995-09-01), Kohno

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