Light generator and exposure apparatus

Details Light generator and exposure apparatus Light generator and exposure apparatus

2006-08-15

2006-08-15

Lee, John R. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S461100, C250S492100, C250S493100, C362S263000, C362S266000

Reexamination Certificate

active

07091507

ABSTRACT:
A light generator for irradiating a laser onto a target, for generating plasma, and for producing light from the plasma, includes a first optical system for introducing the light to the target, a second optical system for introducing the light, and a unit for irradiating the laser onto debris that attaches to at least one of the first and second optical systems by changing an irradiation condition of the laser differently from that used to generate the plasma.

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R. H. Moyer et al.; “Laser-Produced Plasma (LPP) Scale-up and Commercialization”;Proceedings of SPIE; vol. 4343; (2001); pp. 249-251.

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