Light generation apparatus, exposure apparatus, and device...

Details Light generation apparatus, exposure apparatus, and device... Light generation apparatus, exposure apparatus, and device...

2005-05-10

2005-05-10

Church, Craig E. (Department: 2882)

X-ray or gamma ray systems or devices

Electronic circuit

X-ray source power supply

C378S034000, C250S492200

Reexamination Certificate

active

06891927

ABSTRACT:
A light generation apparatus is capable of widely changing the intensity of generated light. The light generation apparatus includes an X-ray source, a high-voltage generation circuit, and a CPU. The high-voltage generation circuit has a plurality of capacitors, and a plurality of switches, which are arranged on the charging and discharging paths of the capacitors. The CPU controls the switches to switch a capacitor for supplying electric energy to the X-ray point source, thereby changing electric energy supplied to the X-ray point source.

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patent: 20020141533 (2002-10-01), Kitaoka
patent: 9-184900 (1997-07-01), None

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