Light gas vacuum pumping system

Details Light gas vacuum pumping system Light gas vacuum pumping system

2007-03-13

2007-03-13

Trieu, Theresa (Department: 3748)

Rotary expansible chamber devices

Multistage

C418S055100, C418S055200, C418S201100, C073S040700, C073S049200

Reexamination Certificate

active

10845991

ABSTRACT:
A vacuum pumping system includes a primary vacuum pump having an inlet for coupling to a system, and a secondary vacuum pump having an inlet coupled to the exhaust of the primary vacuum pump. The primary vacuum pump is an oil-free, positive displacement vacuum pump having multiple clearance seals between the inlet and the exhaust. The primary vacuum pump may be a scroll vacuum pump, and the secondary vacuum pump may be an oil-free diaphragm pump. The system may include a valve coupled to the exhaust of the primary vacuum pump and configured to couple the exhaust of the primary vacuum pump to an interpump exhaust in response to a selected condition, such as the pressure level at the exhaust of the primary vacuum pump.

REFERENCES:
patent: 4499752 (1985-02-01), Fruzzetti et al.
patent: 4735084 (1988-04-01), Fruzzetti
patent: 5537857 (1996-07-01), Grosse Bley
patent: 5542828 (1996-08-01), Grenci et al.
patent: 5708194 (1998-01-01), Bohm et al.
patent: 5821404 (1998-10-01), Bohm et al.
patent: 6021663 (2000-02-01), Bohm
patent: 0 730 093 (1996-09-01), None
patent: 1 101 942 (2001-05-01), None
patent: WO 03/023229 (2003-02-01), None

Affiliated with

Also associated with

Rating

Light gas vacuum pumping system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Light gas vacuum pumping system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Light gas vacuum pumping system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3769234