Light-gas-isolation, oil-free, scroll vaccum-pump system

Details Light-gas-isolation, oil-free, scroll vaccum-pump system Light-gas-isolation, oil-free, scroll vaccum-pump system

1995-06-06

1996-08-06

Thorpe, Timothy S.

Rotary expansible chamber devices

Methods

418 552, 417201, F04C 1804

Patent

active

055428282

ABSTRACT:
Close tolerance, oil free scroll type vacuum pumps, when run at RPM speeds in excess of 1800 RPM, prevent pump exhaust outlet to pump vacuum inlet back diffusion (backwards migration) of light atmospheric gases from a process vacuum is useful in a number of vacuum applications. The light gas isolation capability of the invention scroll type vacuum pumps is due to the close tolerance pumping mechanism that these pumps employ, the RPM speed that the mechanism is operated at, and the absence of light gas absorbing materials inside the pump such as oil.

REFERENCES:
patent: 4613291 (1986-09-01), Sidransky
patent: 4673399 (1987-06-01), Hayano et al.
patent: 4842499 (1989-06-01), Nishida et al.
patent: 5062771 (1991-11-01), Satou et al.
patent: 5366358 (1994-11-01), Grenci et al.
patent: 5400604 (1995-03-01), Hafner et al.

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