Light filters for microelectronics

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube

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Details

430 20, 430330, 350311, 350330, G03F 726

Patent

active

048761656

ABSTRACT:
Filters suitable for microelectronic uses and the like may be prepared directly on substrates either as monolithically integrated filters or as hybrid filters using a soluble dye material in a resin. The resin may be applied to microelectronic substrates and patterned by conventional microphotolithographic processes.

REFERENCES:
patent: 4668606 (1987-05-01), Do Minh et al.

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