Photocopying – Projection printing and copying cameras – Identifying – composing – or selecting
Patent
1981-03-18
1983-07-05
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Identifying, composing, or selecting
269 21, 279 3, G03B 2752
Patent
active
043915116
ABSTRACT:
A light exposure device and method for exposing and printing a predetermined pattern on an exposure surface of a substrate comprises measuring means for measuring curvature of the exposure surface of the substrate, a chuck including suck and hold means for sucking and holding a back surface of the substrate opposite to the exposure surface and deforming means for imparting a force to the back surface of the substrate to deform the substrate, and control means for controlling the deforming means of the chuck in accordance with the curvature of the exposure surface of the substrate measured by the measuring means such that the exposure surface of the substrate conforms to an image surface of the pattern over an entire exposure area within a predetermined allowable error.
REFERENCES:
patent: 3853313 (1974-12-01), Appenzeller et al.
IBM Technical Disclosure Bulletin, "Flatness Controlled Wafer Clamping Pedestal", Rottmann et al., vol. 15, No. 10, Mar. 1973, p. 3016.
Aiuchi Susumu
Akiyama Nobuyuki
Kembo Yukio
Nakagawa Yasuo
Nomoto Mineo
Hitachi , Ltd.
Wintercorn Richard A.
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