Light exposure controlling method

Details Light exposure controlling method Light exposure controlling method

1998-02-13

2000-09-26

Young, Christopher G.

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

430296, G03F 900

Patent

active

061240648

ABSTRACT:
Projection for evaluation is carried out prior to actual projection according to a predetermined projection sequence without performing shot-by-shot light exposure control to measure average pulse energy p(i) through an integrator sensor every shot area. Then set pulse energy S.sub.0 /N is divided by the average pulse energy p(i), thereby calculating correction coefficients t(i) (=S.sub.0 /p(i).multidot.N)) of pulse energy for the i-th shot areas and thus producing a correction data map upon actual projection on the i-th shot area, an adjustment amount obtained by multiplying an adjustment amount before correction by the correction coefficient t(i) is used as an adjustment amount in an energy fine adjuster.

REFERENCES:
patent: 5466549 (1995-11-01), Yamada
patent: 5473412 (1995-12-01), Ozawa
patent: 5534970 (1996-07-01), Nakashima et al.
patent: 5574537 (1996-11-01), Ozawa
patent: 5659383 (1997-08-01), Ozawa
patent: 5736281 (1998-04-01), Watson

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