Illumination – Light source and modifier – Plural serial lens elements or components
Patent
1995-07-20
1997-09-02
Cariaso, Alan
Illumination
Light source and modifier
Plural serial lens elements or components
362 32, 362277, 362331, 359615, 359622, F21V 504
Patent
active
056624107
ABSTRACT:
A light exposure and illuminating device in which an outgoing light of an exposure light source is supplied to a light exposure section for illuminating an object to be exposed to light. A moving scattering medium scatters a laser beam outgoing from a laser light source. A light condenser lens condenses the laser beam scattered by the moving scattering medium to a laser beam of a suitable diameter. A plurality of prisms condense the laser light condensed by the light condenser lens as a rectangle of a suitable size on an incident surface of a fly-eye lens. The fly-eye lens uniforms the intensity distribution of the laser beam in cooperation with a folding lens. Another condenser lens radiates the laser beam uniformed in intensity distribution by the fly-eye lens and the firstly-stated condenser lens as a exposure illuminating light on a mask for light exposure on which a light exposure pattern is pre-formed. With the present light exposure illuminating device, a small-sized inexpensive light source may be realized. In addition, the illuminating light is uniform and free of fluctuations or speckles, while a high light source utilization efficiency may be achieved.
REFERENCES:
patent: 3407294 (1968-10-01), Hill
patent: 4656562 (1987-04-01), Sugino
patent: 5016149 (1991-05-01), Tanaka et al.
patent: 5317450 (1994-05-01), Kamon
patent: 5392094 (1995-02-01), Kudo
patent: 5459547 (1995-10-01), Shiozawa
Cariaso Alan
Sony Corporation
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