Light exposing device for manufacturing semiconductor device whi

Details Light exposing device for manufacturing semiconductor device whi Light exposing device for manufacturing semiconductor device whi

1996-03-06

2000-05-23

Moses, Richard

Photocopying

Projection printing and copying cameras

Step and repeat

355 55, 355 67, G03B 2742, G03B 2752, G03B 2754

Patent

active

060671459

ABSTRACT:
A light-exposing device for making a semiconductor device. A reticle has patterns to be exposed to light. A blind controls a light-exposing area of the reticle. An optical system between the blind and the reticle condenses light passing through the blind. Adjacent patterns on a reticle are consecutively projected by superimposing light-exposing energy. An extra optical system condenses light passing through the blind. The usable area of the reticle is maximized; the interval between patterns is not critical; and inferiority by either lack or excess of the exposure to light between the patterns is reduced.

REFERENCES:
patent: 4723845 (1988-02-01), Mizutani et al.
patent: 4891663 (1990-01-01), Hirose
patent: 4943733 (1990-07-01), Mori et al.
patent: 4977426 (1990-12-01), Hirose
patent: 5105075 (1992-04-01), Ohta et al.
patent: 5311362 (1994-05-01), Matsumoto et al.
patent: 5379090 (1995-01-01), Shiraishi
patent: 5432608 (1995-07-01), Komoriya et al.

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