Light-emitting semiconductor device using group III Nitrogen com

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction

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257 87, 257 94, 257102, 257103, 257101, H01L 2906, H01L 3300

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active

060052589

ABSTRACT:
A light-emitting semiconductor device (10) consecutively includes a sapphire substrate (1), an AlN buffer layer (2), a silicon (Si) doped GaN n.sup.+ -layer (3) of high carrier (n-type) concentration, a Si-doped (Al.sub.x3 Ga.sub.1-x3).sub.y3 In.sub.1-y3 N n.sup.+ -layer (4) of high carrier (n-type) concentration, a zinc (Zn) and Si-doped (Al.sub.x2 Ga.sub.1-x2).sub.y2 In.sub.1-y2 N emission layer (5), and a Mg-doped (Al.sub.x1 Ga.sub.1-x1).sub.y1 In.sub.1-y1 N p-layer (6). The AlN layer (2)--is 500 .ANG. in thickness. The GaN N.sup.+ -layer (3) is about 2.0 .mu.m in thickness and has an electron concentration of about 2.times.10.sup.18 /cm.sup.3. The n.sup.+ -layer (4) is about 2.0 .mu.m in thickness and has an electron concentration of about 2.times.10.sup.18 /cn.sup.3. The emission layer (5) is about 0.5 .mu.m in thickness. The p-layer 6 is about 1.0 .mu.m in thickness and has a hole concentration of about 2.times.10.sup.17 /cm.sup.3. Nickel electrodes (7, 8) are connected to the p-layer (6) and n.sup.+ -layer (4), respectively. A groove (9) electrically insulates the electrodes (7, 8) from each other. The composition ration of Al, Ga, and In in each of the layers (4, 5, 6) is selected to meet the lattice constant of GaN in the n.sup.+ -layer (3). The LED (10) is designed to improve luminous intensity and to obtain a purer blue color.

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Goldenberg et al. "Ultraviolet and violet light-emitting GaN diodes grown by low-pressure metalorganic chemical vapor deposition". Applied Physics Letters 62(1993) Jan. 25, No. 4, New York.
Khan et al., "Effects of Si on Photoluminescence of GaN", Solid State Communication, vol. 57, No. 6, pp. 405-409, 1986.
Matsushita et al., "PN Junction Type Sic Blue Light-Emitting Diodes", Applied Physics vol. 60, No. 2, pp. 159-162, Feb. 1991.
Nakamura et al.,"P-GaN/N-InGaN/N-GaN Double-Heterostructure Blue-Light-Emitting Diodes",Japanese J of Applied Physics, Jan. 1993, vol. 32,No.1A/B, Part 2, pp. L8-L11.
Nakamura et al.,"Candela-class high-brightness InGaN/AlGaN double-heterostructure blue-light-emitting diodes",Applied Physics Letters, Mar. 1994,vol. 64, No. 13, pp. 1687-1689.
Nakamura et al.,"High-brightness InGaN/AlGaN double-heterostructure blue-green-light-emitting diodes",J.of Applied Physics,Dec. 1994,vol. 76, No. 12, pp. 8189-8191.

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