Light-emitting/receiving combined unit and displacement...

Optics: measuring and testing – Position or displacement

Reexamination Certificate

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Details

C356S616000

Reexamination Certificate

active

06980303

ABSTRACT:
The present invention provides a light emitting/receiving composite unit (1) for emitting and receiving lights, which includes a light source (3), an optical splitting unit (4) for splitting returning lights to the composite unit (1) into a plurality of lights, a polarizing unit (5) for increasing and decreasing quantity of lights transmitted therefrom corresponding to polarization state of the returning lights, and an optical receiving unit (6) which has a plurality of photo-detecting elements (6—1to6—4) for detecting the lights transmitted through the polarizing unit (5), which are unitedly integrated into one unit. Also, the present invention provides a displacement detection apparatus of grating interference type, which includes thus unitedly integrated composite unit (1), and an external optical system of an objective unit having a reflection type diffraction grating RG, a reflecting unit (R1a, R1b) for reflecting lights from the composite unit (1) to the reflection type diffraction grating RG, a polarizing unit (WP1a, WP1b) for changing polarization state of diffracted lights from the reflection type diffraction grating RG, and a reflecting unit (R2a, R2b) for reflecting lights transmitted through the polarizing unit (WP1a, WP1b) to cause the reflected lights go backward.

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patent: 6807671 (2004-10-01), Horimai
patent: 2003/0123044 (2003-07-01), Oka
patent: 2003/0202189 (2003-10-01), Tamiya et al.
patent: 63-247616 (1988-10-01), None
patent: 63-277926 (1988-11-01), None
patent: 5-215574 (1993-08-01), None
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