Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Dopant introduction into semiconductor region
Patent
1998-09-02
2000-05-16
Chaudhuri, Olik
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Dopant introduction into semiconductor region
438 38, 438 46, 438 47, 257 94, 257101, 372 45, H01L 2120
Patent
active
060636440
ABSTRACT:
A light-emitting element, or array of light-emitting elements, is formed by diffusion of an impurity into a semiconductor substrate, creating a light-emitting region. Following the diffusion, the surface zone of the light-emitting region, which includes crystal defects caused by the diffusion process, is removed by etching, thereby increasing the light-emitting efficiency by removing nonradiative recombination centers.
REFERENCES:
patent: 3653989 (1972-04-01), Widmer
patent: 3728784 (1973-04-01), Schmidt
patent: 5084742 (1992-01-01), Tokuda
Yoshihiro Takekida, "Design of Optical Printers", Triceps, 1985, pp. 121-126.
Hamano Hiroshi
Ogihara Mitsuhiko
Shimizu Takatoku
Taninaka Masumi
Chaudhuri Olik
Frank Robert J.
Okidata Corporation
Wille Douglas A.
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