Light-emitting element and array with etched surface, and fabric

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Dopant introduction into semiconductor region

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438 38, 438 46, 438 47, 257 94, 257101, 372 45, H01L 2120

Patent

active

060636440

ABSTRACT:
A light-emitting element, or array of light-emitting elements, is formed by diffusion of an impurity into a semiconductor substrate, creating a light-emitting region. Following the diffusion, the surface zone of the light-emitting region, which includes crystal defects caused by the diffusion process, is removed by etching, thereby increasing the light-emitting efficiency by removing nonradiative recombination centers.

REFERENCES:
patent: 3653989 (1972-04-01), Widmer
patent: 3728784 (1973-04-01), Schmidt
patent: 5084742 (1992-01-01), Tokuda
Yoshihiro Takekida, "Design of Optical Printers", Triceps, 1985, pp. 121-126.

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