Light emitting device methods

Details Light emitting device methods Light emitting device methods

2006-07-11

2006-07-11

Sarkar, Asok Kumar (Department: 2891)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

C438S042000, C438S736000, C438S950000, C438S956000

Reexamination Certificate

active

07074631

ABSTRACT:
A method includes disposing a planarization layer on a surface of a layer of semiconductor material and disposing a lithography layer on a surface of the planarization layer. The method also includes performing nanolithography to remove at least a portion of the planarization layer, at least a portion of the lithography layer and at least a portion of the layer of semiconductor material, thereby forming a dielectric function in the surface of the layer of semiconductor material that varies spatially according to a pattern.

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