Light emitting device and manufacturing method thereof

Details Light emitting device and manufacturing method thereof Light emitting device and manufacturing method thereof

2009-03-20

2010-10-26

Smith, Bradley K (Department: 2894)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S151000, C438S158000, C438S164000, C257SE21158, C257SE21411, C257SE33055

Reexamination Certificate

active

07820464

ABSTRACT:
The light emitting device according to the present invention is characterized in that a gate electrode comprising a plurality of conductive films is formed, and concentrations of impurity regions in an active layer are adjusted with making use of selectivity of the conductive films in etching and using them as masks. The present invention reduces the number of photolithography steps in relation to manufacturing the TFT for improving yield of the light emitting device and shortening manufacturing term thereof, by which a light emitting device and an electronic appliance are inexpensively provided.

REFERENCES:
patent: 4835740 (1989-05-01), Sato
patent: 4907048 (1990-03-01), Huang
patent: 4963504 (1990-10-01), Huang
patent: 5055899 (1991-10-01), Wakai et al.
patent: 5100820 (1992-03-01), Tsubone
patent: 5108935 (1992-04-01), Rodder
patent: 5182619 (1993-01-01), Pfiester
patent: 5241203 (1993-08-01), Hsu et al.
patent: 5247190 (1993-09-01), Friend et al.
patent: 5323042 (1994-06-01), Matsumoto
patent: 5341012 (1994-08-01), Misawa et al.
patent: 5393682 (1995-02-01), Liu
patent: 5399502 (1995-03-01), Friend et al.
patent: 5412240 (1995-05-01), Inoue et al.
patent: 5412493 (1995-05-01), Kunii et al.
patent: 5414547 (1995-05-01), Matsuo et al.
patent: 5441618 (1995-08-01), Matsuda et al.
patent: 5482871 (1996-01-01), Pollack
patent: 5499123 (1996-03-01), Mikoshiba
patent: 5532175 (1996-07-01), Racanelli et al.
patent: 5534716 (1996-07-01), Takemura
patent: 5543340 (1996-08-01), Lee
patent: 5543947 (1996-08-01), Mase et al.
patent: 5567966 (1996-10-01), Hwang
patent: 5581092 (1996-12-01), Takemura
patent: 5583067 (1996-12-01), Sanchez
patent: 5585295 (1996-12-01), Wu
patent: 5594569 (1997-01-01), Konuma et al.
patent: 5608251 (1997-03-01), Konuma et al.
patent: 5627084 (1997-05-01), Yamazaki et al.
patent: 5637519 (1997-06-01), Tsai et al.
patent: 5643826 (1997-07-01), Ohtani et al.
patent: 5659375 (1997-08-01), Yamashita et al.
patent: 5677207 (1997-10-01), Ha
patent: 5686328 (1997-11-01), Zhang et al.
patent: 5708485 (1998-01-01), Sato et al.
patent: 5708486 (1998-01-01), Miyawaki et al.
patent: 5717224 (1998-02-01), Zhang
patent: 5726720 (1998-03-01), Watanabe et al.
patent: 5733420 (1998-03-01), Matsuda et al.
patent: 5742363 (1998-04-01), Bae
patent: 5744822 (1998-04-01), Takayama et al.
patent: 5757444 (1998-05-01), Takemura
patent: 5767930 (1998-06-01), Kobayashi et al.
patent: 5773330 (1998-06-01), Park
patent: 5815226 (1998-09-01), Yamazaki et al.
patent: 5818550 (1998-10-01), Kadota et al.
patent: 5821622 (1998-10-01), Tsuji et al.
patent: 5841170 (1998-11-01), Adan et al.
patent: 5851861 (1998-12-01), Suzawa et al.
patent: 5852488 (1998-12-01), Takemura
patent: 5858867 (1999-01-01), Hsia et al.
patent: 5903249 (1999-05-01), Koyama et al.
patent: 5923961 (1999-07-01), Shibuya et al.
patent: 5923962 (1999-07-01), Ohtani et al.
patent: 5982348 (1999-11-01), Nakajima et al.
patent: 5990542 (1999-11-01), Yamazaki
patent: 5994721 (1999-11-01), Zhong et al.
patent: 6001714 (1999-12-01), Nakajima et al.
patent: 6002462 (1999-12-01), Sato et al.
patent: 6011274 (2000-01-01), Gu et al.
patent: 6031290 (2000-02-01), Miyazaki et al.
patent: 6031512 (2000-02-01), Kadota et al.
patent: 6078060 (2000-06-01), Shibuya et al.
patent: 6087679 (2000-07-01), Yamazaki et al.
patent: 6093934 (2000-07-01), Yamazaki et al.
patent: 6104461 (2000-08-01), Zhang et al.
patent: 6115094 (2000-09-01), Fukunaga
patent: 6147451 (2000-11-01), Shibata et al.
patent: 6153445 (2000-11-01), Yamazaki et al.
patent: 6153893 (2000-11-01), Inoue et al.
patent: 6166397 (2000-12-01), Yamazaki et al.
patent: 6166414 (2000-12-01), Miyazaki et al.
patent: 6198133 (2001-03-01), Yamazaki et al.
patent: 6201585 (2001-03-01), Takano et al.
patent: 6211536 (2001-04-01), Zhang
patent: 6222595 (2001-04-01), Zhang et al.
patent: 6225150 (2001-05-01), Lee et al.
patent: 6238754 (2001-05-01), Shohara et al.
patent: 6259138 (2001-07-01), Ohtani et al.
patent: 6262438 (2001-07-01), Yamazaki et al.
patent: 6274400 (2001-08-01), Jen
patent: 6274887 (2001-08-01), Yamazaki et al.
patent: 6277679 (2001-08-01), Ohtani
patent: 6281552 (2001-08-01), Kawasaki et al.
patent: 6284577 (2001-09-01), Suzawa et al.
patent: 6288413 (2001-09-01), Kamiura et al.
patent: 6303963 (2001-10-01), Ohtani et al.
patent: 6306694 (2001-10-01), Yamazaki et al.
patent: 6323070 (2001-11-01), Yamazaki
patent: 6323521 (2001-11-01), Seo
patent: 6335290 (2002-01-01), Ishida
patent: 6337731 (2002-01-01), Takemura
patent: 6341003 (2002-01-01), Ashizawa et al.
patent: 6346718 (2002-02-01), Yamanaka et al.
patent: 6346730 (2002-02-01), Kitakado et al.
patent: 6358766 (2002-03-01), Kasahara
patent: 6362507 (2002-03-01), Ogawa et al.
patent: 6365917 (2002-04-01), Yamazaki
patent: 6384808 (2002-05-01), Azami
patent: 6392628 (2002-05-01), Yamazaki et al.
patent: 6399988 (2002-06-01), Yamazaki
patent: 6407430 (2002-06-01), Ohtani et al.
patent: 6420200 (2002-07-01), Yamazaki et al.
patent: 6462802 (2002-10-01), Nishimura et al.
patent: 6469317 (2002-10-01), Yamazaki et al.
patent: 6475836 (2002-11-01), Suzawa et al.
patent: 6475845 (2002-11-01), Kimura
patent: 6498369 (2002-12-01), Yamazaki et al.
patent: 6501098 (2002-12-01), Yamazaki
patent: 6501448 (2002-12-01), Komiya et al.
patent: 6524895 (2003-02-01), Yamazaki et al.
patent: 6541294 (2003-04-01), Yamazaki et al.
patent: 6548960 (2003-04-01), Inukai
patent: 6573195 (2003-06-01), Yamazaki et al.
patent: 6576926 (2003-06-01), Yamazaki et al.
patent: 6596571 (2003-07-01), Arao et al.
patent: 6646287 (2003-11-01), Ono et al.
patent: 6690033 (2004-02-01), Yamazaki et al.
patent: 6706544 (2004-03-01), Yamazaki et al.
patent: 6759678 (2004-07-01), Yamazaki et al.
patent: 6777763 (2004-08-01), Zhang et al.
patent: 6784457 (2004-08-01), Yamazaki et al.
patent: 6812490 (2004-11-01), Takehashi et al.
patent: 6835607 (2004-12-01), Takemura et al.
patent: 6861670 (2005-03-01), Ohtani et al.
patent: 6872604 (2005-03-01), Yamazaki et al.
patent: 6909114 (2005-06-01), Yamazaki
patent: 6909117 (2005-06-01), Ohnuma
patent: 6936846 (2005-08-01), Koyama et al.
patent: 7064020 (2006-06-01), Yamazaki
patent: 7113154 (2006-09-01), Inukai
patent: 7122835 (2006-10-01), Ikeda et al.
patent: 7194085 (2007-03-01), Yamazaki et al.
patent: 7218361 (2007-05-01), Yamazaki et al.
patent: 7235810 (2007-06-01), Yamazaki et al.
patent: 7259427 (2007-08-01), Yamazaki et al.
patent: 2001/0055841 (2001-12-01), Yamazaki et al.
patent: 2003/0057419 (2003-03-01), Murakami et al.
patent: 2005/0040400 (2005-02-01), Yamazaki et al.
patent: 2006/0051906 (2006-03-01), Yamazaki
patent: 2006/0081931 (2006-04-01), Yamazaki et al.
patent: 0 451 968 (1991-10-01), None
patent: 0 522 991 (1993-01-01), None
patent: 0 803 911 (1997-10-01), None
patent: 0 886 319 (1998-12-01), None
patent: 1 005 094 (2000-05-01), None
patent: 04-369271 (1992-12-01), None
patent: 05-102483 (1993-04-01), None
patent: 05-257137 (1993-10-01), None
patent: 06-037314 (1994-02-01), None
patent: 06-148685 (1994-05-01), None
patent: 07-072675 (1995-03-01), None
patent: 07-130652 (1995-05-01), None
patent: 07-202210 (1995-08-01), None
patent: 07-235680 (1995-09-01), None
patent: 08-051207 (1996-02-01), None
patent: 08-078329 (1996-03-01), None
patent: 08-096959 (1996-04-01), None
patent: 08-110530 (1996-04-01), None
patent: 08-146402 (1996-06-01), None
patent: 08-160464 (1996-06-01), None
patent: 08-274336 (1996-10-01), None
patent: 08-328000 (1996-12-01), None
patent: 08-328000 (1996-12-01), None
patent: 09-063770 (1997-03-01), None
patent: 10-135468 (1998-05-01), None
patent: 10-135469 (1998-05-01), None
patent: 10-144929 (1998-05-01), None
patent: 10-154814 (1998-06-01), None
patent: 10-247735 (1998-09-01), None
patent: 10-268347 (1998-10-01), None
patent: 2000-236097 (1999-08-01), None
patent: 2000-243975 (1999-09-01), None
patent: 11-338786 (1999-12-01), None
patent: 11-339968 (1999-12-01), None
patent: 2000-223716 (2000-08-01), None
patent: 2000-236097 (2000-08-01), None
patent: 2000-243975 (2000-09-01), None
patent: 2000-315798 (2000-11-01), None
patent: 2001-343933 (2001-12-01), None
patent:

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