Light emitting device and fabrication method thereof

Details Light emitting device and fabrication method thereof Light emitting device and fabrication method thereof

2007-12-12

2011-11-08

Nguyen, Khiem D (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Incoherent light emitter structure

In combination with or also constituting light responsive...

C257S086000, C257SE33001

Reexamination Certificate

active

08053789

ABSTRACT:
There is provided a method of fabricating a vertical light emitting diode. The method comprises the steps of: growing a low doped first conductive semiconductor layer on a sacrificial substrate; forming an aluminum layer on the low doped first conductive semiconductor layer; forming an AAO layer having a large number of holes formed therein by performing anodizing treatment of the aluminum layer; etching and patterning the low doped first conductive semiconductor layer using the aluminum layer with a large number of the holes as a shadow mask to expose a portion of the low doped first conductive semiconductor layer, thereby forming a large number of grooves; removing the aluminum layer remaining on the low doped first conductive semiconductor layer; sequentially forming a high doped first conductive semiconductor layer, an active layer and a second conductive semiconductor layer on the low doped first conductive semiconductor layer with a large number of the grooves; forming a metal reflective layer and a conductive substrate on the second conductive semiconductor layer; separating the sacrificial substrate; and forming an electrode pad on the other surface of the low doped first conductive semiconductor layer, the electrode pad being filled in a large number of the grooves to be in ohmic contact with the high doped first conductive semiconductor layer.

REFERENCES:
patent: 6495862 (2002-12-01), Okazaki et al.
patent: 2005/0156185 (2005-07-01), Kim et al.
patent: 2006/0270206 (2006-11-01), Cho et al.
patent: 07-193275 (1995-07-01), None
patent: 2006-324661 (2006-11-01), None

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