Light emitting device

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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Details

C372S045013, C257S013000, C257S014000, C257S103000

Reexamination Certificate

active

06233266

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a light emitting device, such as a semiconductor laser, a light-emitting diode or the like, having an active layer and a layer subjected to impurity injection.
2. Description of the Related Art
In a current-injection type light emitting device such as a semiconductor laser, a light emitting diode or the like, in order to improve a current introduction efficiency and a light emission efficiency, a pn junction position and a position of an active layer are preferably set closer to each other. For the same reason, it is preferable to increase concentration of the introduced impurity to a higher level.
However, when impurities of a certain kind are injected into the active layer, the active layer is considerably rapidly deteriorated. Therefore, there are usually employed some countermeasures therefor such as a process of lowering a concentration of the injected impurity in the vicinity of the active layer, a process of separating impurities from the active layer by setting the vicinity of the active layer as a non-doped layer, or the like.
As described above, a doping profile in the vicinity of the active layer is a very important factor which influences reliability of the light emitting device.
Especially, when a III-V compound semiconductor such as GaAs, GaInP or the like is doped with zinc, zinc is very easily diffused and hence easily enters the vicinity of the active layer during crystal growth at a high temperature, which leads to deterioration of the light emitting device (see Endo et al.: Appl. Phys. Lett. 64(1994), p146).
Specifically, if an impurity diffusion region is too close to the active layer, then a lifetime of the light emitting device is lowered, and thereby its reliability is lowered. If, on the other hand, the impurity diffusion region is too far from the active layer, then the position of the impurity diffusion region is displaced relative to the pn junction.
Therefore, although the condition of the introduction of the impurity is an important factor in the light emitting device, it is difficult to control the diffusion of the introduced impurity such as zinc or the like, which considerably lowers a degree of freedom in the doping profile.
SUMMARY OF THE INVENTION
It is therefore an object of the present invention to provide a high-reliability light emitting device by suppressing deterioration of an active layer resulting from diffusion of an introduced impurity.
According to a first aspect of the present invention, a light emitting device includes a layer having lattice mismatching provided between an active layer and a layer into which an impurity is introduced.
According to a second aspect of the present invention, an optical device includes a substrate, a first cladding layer formed on the substrate, an active layer formed on the first cladding layer, a non-doped second cladding layer formed on the active layer, a lattice-mismatched layer formed on the second cladding layer, and a doped third cladding layer formed on the lattice-mismatched layer.
According to the arrangement of the present invention, since the layer having the lattice mismatching is provided, the layer having the lattice mismatching suppresses diffusion of an introduced impurity. Therefore, it is possible to suppress diffusion of the introduced impurity to an active layer beyond the layer having the lattice mismatching, and hence it is possible to suppress deterioration of the active layer and to consequently increase a lifetime of the light emitting device.


REFERENCES:
patent: 5956359 (1999-09-01), Adams et al.
patent: 5995528 (1999-11-01), Fukunaga et al.
patent: 6028874 (2000-02-01), Wada et al.

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