Light device of arranging thin film inspection sensor array,...

Details Light device of arranging thin film inspection sensor array,... Light device of arranging thin film inspection sensor array,...

2008-05-20

2008-05-20

Lee, John R. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559080, C250S559440, C356S504000

Reexamination Certificate

active

07375360

ABSTRACT:
There is disclosed a light device for arranging a thin film pattern sensor array where a sensor array used for inspecting a thin film pattern is made to be arranged without a separate correction pattern film in accordance with an inspection subject.In the light device for arranging the thin film pattern sensor array, a shutter controls a width of a light beam which progresses from a light emitting element array to a sensor array. A correction pattern sled is installed in any one of a fixed location of an upper part of the shutter and a surface of the shutter to be transferable.

REFERENCES:
patent: 4743768 (1988-05-01), Watanabe
patent: 6940604 (2005-09-01), Jung et al.

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