Light detecting element and light detecting array

Details Light detecting element and light detecting array Light detecting element and light detecting array

1989-08-28

1991-02-19

Munson, Gene M.

357 30, H01L 2978, H01L 2714, H01L 3100

Patent

active

049948768

ABSTRACT:
An infrared light detecting element which may be employed in a two-dimensional light detecting array includes a light responsive photodiode that generates electrical charges in response to incident light. The electrical charges are conveyed to a charge storage means and subsequently transferred to a charge coupled device. The charges are stored in potential wells produced opposite electrodes in a laminated structure including a semiconductor substrate on which one charge storage electrode is disposed and a first semiconductor layer disposed on the substrate on which a second charge storage electrode is disposed. The charge storage electrodes are interconnected in series or in parallel. Additional semiconductor layers and charge storage electrodes may be employed. The laminated structure produces a significant increase in the charge storage capacity of the device without increasing its area. The dynamic range of the charge storage capacity and signal-to-noise ratio of the element and the array are significantly improved over the prior art.

REFERENCES:
patent: 4104674 (1978-08-01), Lorenz et al
patent: 4467340 (1984-08-01), Rode et al.
patent: 4614960 (1986-09-01), Bluzer
patent: 4660066 (1987-04-01), Reid
patent: 4737833 (1988-04-01), Tabei
patent: 4851887 (1989-07-01), Hagiwara
patent: 4912560 (1990-03-01), Osawa
Kuen Chow, "Hybrid Infrared Focal-Plane Arrays", IEEE Transactions on Electron Devices, vol. ED-29, No. 1, Jan. 1982, pp. 3-13.

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