Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Light responsive structure
Patent
1997-10-08
1999-02-23
Tran, Minh Loan
Active solid-state devices (e.g., transistors, solid-state diode
Heterojunction device
Light responsive structure
257184, 257436, 257438, H01L 310328
Patent
active
058747524
ABSTRACT:
A light detecting device includes a first conductivity type semiconductor substrate; an insulating semiconductor window layer disposed on the substrate; a concavity in a region of the window layer and penetrating through the window layer; successively disposed in the concavity, a first conductivity type lower cladding layer, a first conductivity type guide layer of a semiconductor material having a band gap energy smaller that the band gap energies of the lower cladding layer and the window layer, an undoped light absorption layer having a band gap energy smaller than that of the first conductivity type guide layer, and a second conductivity type guide layer having a composition approximately identical to that of the first conductivity type guide layer, edges of the first conductivity type guide layer, the light absorption layer, and the second conductivity type guide layer being exposed at a surface of the window layer; and a layer of an insulating material, covering the edges. The interface between the window layer and the lower cladding layer is a regrowth interface and does not contact the absorption layer. The light detecting device has reduced dark current.
REFERENCES:
patent: 4840916 (1989-06-01), Yasuda et al.
Mitsubishi Denki & Kabushiki Kaisha
Tran Minh Loan
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