Light deflector, method of manufacturing light deflector,...

Details Light deflector, method of manufacturing light deflector,... Light deflector, method of manufacturing light deflector,...

2005-08-02

2005-08-02

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S198100, C359S199200, C359S900000, C359S290000

Reexamination Certificate

active

06924914

ABSTRACT:
There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion axis of the elastic support portion as a center to deflect an incident light that enters the reflection surface, wherein a recessed portion is formed on at least one side surface of both sides, which is a surface on which the reflection surface is not formed, and between which the torsion axis of the elastic support portion is interposed.

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Jocelyn T. Nee et al., “Stretched-Film Micromirrors for Improved Optical Flatness,” Mens2000, pp. 704-709 (2000).

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