Light deflecting method and apparatus efficiently using a...

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element

Reexamination Certificate

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C359S198100, C359S213100, C359S214100, C359S223100, C359S225100

Reexamination Certificate

active

07457019

ABSTRACT:
A light deflecting apparatus deflecting input light in directions for at least one deflection-axis includes a plate-like-shaped member configured to reflect input light, a substrate above which the plate-like-shaped member is placed with no fixed portion relative to the substrate, a supporting member serving as a fulcrum for the plate-like-shaped member to tilt, a plurality of space regulating members configured to regulate a space in which the plate-like-shaped member placed on the supporting member above the substrate is freely movable, and a plurality of electrodes arranged around the supporting member on the substrate and facing a bottom surface of the plate-like-shaped member.

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