Light curtain safety system for semiconductor device handler

Details Light curtain safety system for semiconductor device handler Light curtain safety system for semiconductor device handler

2005-02-15

2005-02-15

Black, Thomas G. (Department: 3661)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Robot control

C700S001000, C700S056000, C700S255000, C250S221000, C250S559400

Reexamination Certificate

active

06856862

ABSTRACT:
A light curtain safety system for a semiconductor device handler that includes a programmable control unit and a robot mechanism that is selectively operated in response to signals generated by the control unit. The light curtain safety system includes an apparatus for generating a light curtain such that accessing the robot mechanism requires breaking the light curtain. The light curtain safety system detects an operating state of the semiconductor device handler using signals generated in the control unit, and allows de-activation of the light curtain apparatus only when operating state of the semiconductor device handler is in a predetermined “safe” operating state. When the light curtain apparatus is active and the light curtain is broken, the light curtain safety system causes the semiconductor device handler to terminate power flow to the robot mechanism.

REFERENCES:
patent: 5015840 (1991-05-01), Blau
patent: 5280622 (1994-01-01), Tino

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