Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1983-12-09
1986-07-22
Kittle, John E.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356430, 250563, 250572, G01N 2100
Patent
active
046015760
ABSTRACT:
A two-stage light collector, including a first stage which admits a scanning beam and a second stage which is optically connected to the first stage and has a light detector therein. The first stage has a shape which re-images diffusely scattered radiation from a target on which the radiation impinges. The first stage directs light toward an entrance aperture in the second stage which indirectly reflects light toward the detector associated with the second stage.
REFERENCES:
patent: 3663824 (1972-05-01), Blaisdell et al.
patent: 3712979 (1973-01-01), Padgitt
patent: 4321630 (1982-03-01), Kramer
patent: 4360275 (1982-11-01), Louderback
patent: 4378159 (1983-03-01), Galbraith
patent: 4412746 (1983-11-01), Yokouchi
Kittle John E.
Schneck Thomas
Tencor Instruments
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