Light blocking layers in MEMS packages

Details Light blocking layers in MEMS packages Light blocking layers in MEMS packages

2006-05-09

2006-05-09

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

Reexamination Certificate

active

07042623

ABSTRACT:
Disclosed herein is a micromirror array device package having a light absorbing material disposed within the package for reducing undesired light scattering. The light absorbing material can be deposited as a thin film (or strip, frame, segments or a combination thereof), or as a vertical wall insert between the micromirror array device and a cover substrate of the package.

REFERENCES:
patent: 6624921 (2003-09-01), Glenn et al.
patent: 6844959 (2005-01-01), Huibers et al.

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