Optical waveguides – With optical coupler – With alignment device
Reexamination Certificate
2006-03-07
2006-03-07
Kianni, Kaveh (Department: 2883)
Optical waveguides
With optical coupler
With alignment device
C385S046000, C385S014000, C385S025000
Reexamination Certificate
active
07010200
ABSTRACT:
The light guide substrate2has mirror receiving grooves24and light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrors31with respect to the grooves24. The actuator substrate4has mirrors31and actuators which place the mirrors31in a state in which the mirrors are drawn in toward the substrate4, or a state in which the mirrors protrude from the substrate4. The light guide substrate2and actuator substrate4are aligned using alignment marks and joined with a spacer3interposed so that the mirrors31retract from the grooves24when the mirrors31are drawn in toward the substrate4, and so that the mirrors31advance into the grooves24when the mirrors31protrude from the substrate4. This alignment is performed in a state in which all of the mirrors31are drawn in toward the substrate4.
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Akagawa Keiichi
Ishizuya Tohru
Kanaya Masatoshi
Kurumada Katsuhiko
Suzuki Junji
Frishauf Holtz Goodman & Chick P.C.
Kianni Kaveh
Nikon Corporation
NTT Electronics Corporation
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