Light beam scanner using large electrostatic force

Details Light beam scanner using large electrostatic force Light beam scanner using large electrostatic force

1998-07-28

1999-09-28

Phan, James

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359223, G02B 2608

Patent

active

059597607

ABSTRACT:
A light beam scanner includes a supporting substrate. Fixed electrodes of a first set are provided on the supporting substrate to oppose to each other. A mirror is provided between the fixed electrodes, has torsion bars physically connected to the supporting substrate and a mirror electrode section in end portions of the mirror opposing to the fixed electrodes at least. The mirror rotatably vibrates between an upper position of the one fixed electrode and a lower position thereof by torsion force of the torsion bars and electrostatic force due to the voltage using the torsion bars as a rotation axis, when a voltage is applied between one of the fixed electrodes and the electrode section.

REFERENCES:
patent: 4317611 (1982-03-01), Petersen
patent: 5552924 (1996-09-01), Tregilgas

Affiliated with

Also associated with

Rating

Light beam scanner using large electrostatic force does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Light beam scanner using large electrostatic force, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Light beam scanner using large electrostatic force will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-710039