Light absorptive antireflector

Details Light absorptive antireflector Light absorptive antireflector

1997-08-25

1999-08-24

Turner, Archene

Stock material or miscellaneous articles

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Including components having same physical characteristic in...

313461, 359359, 359580, 359585, 428212, 428412, 428336, 428446, 428469, 428472, 428432, 428698, 428912, 427162, 4271633, 427164, 427166, C03C 1723

Patent

active

059423196

ABSTRACT:
A light absorptive antireflector comprising a substrate, a light absorbing film formed on the substrate and a silica film formed on the light absorbing film, to reduce reflection of incident light from the silica film side, wherein the geometrical film thickness of the light absorbing film is from 5 to 25 nm, and the geometrical film thickness of the silica film is from 70 to 110 nm.

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