Ligand stabilized +1 metal beta-diketonate coordination complexe

Details Ligand stabilized +1 metal beta-diketonate coordination complexe Ligand stabilized +1 metal beta-diketonate coordination complexe

1992-03-16

1993-06-15

Dees, Jose G.

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

556114, 556115, 556116, C07F 108, C07F 110

Patent

active

052200442

ABSTRACT:
Chemical vapor deposition precursors for depositing copper, silver, rhodium and iridium metals on substrates comprise ligand stabilized +1 metal beta-diketonate coordination complexes of said metals. Uses of such precursors in CVD processes are also provided.

REFERENCES:
patent: 4385005 (1983-05-01), Doyle
patent: 4842891 (1991-06-01), Miyazaki et al.
patent: 5019531 (1991-05-01), Awaya et al.
Partenheimer et al., Inorg. Chem., vol. 11, No. 11, pp. 2840-2841 (1972).
Yamamoto et al., Bull. Chem. Soc. Japan, vol. 51, No. 6, pp. 1835-1838 (1978).
Bennett et al., Inorg. Chem., vol. 10, No. 11, pp. 2387-2395 (1971).

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