Lift-off method and chemical liquid tank

Details Lift-off method and chemical liquid tank Lift-off method and chemical liquid tank

2007-06-26

2007-06-26

Kornakov, M. (Department: 1746)

Cleaning and liquid contact with solids

Processes

With treating fluid motion

C134S002000, C134S025400, C134S042000, C216S040000, C438S745000, C438S747000, C438S906000

Reexamination Certificate

active

11111860

ABSTRACT:
A lift-off procedure is provided which enables prevention of damage to a wiring pattern caused by contact of a metal being peeled off from a wafer with a wiring pattern at a time of lift-off procedure. A wafer having a surface on which a pattern is formed which contains a pattern portion to be removed is soaked into a chemical liquid at an angle at which the surface faces downward.

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