Lifetime improvement in microstructures with deformable...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S291000, C359S224200

Reexamination Certificate

active

11303088

ABSTRACT:
A microelectromechanical device with a plastically deformable element of is exposed to illumination light so as to elongate the lifetime of the device on the customer side.

REFERENCES:
patent: 2003/0116528 (2003-06-01), Bernstein et al.
patent: 2004/0233505 (2004-11-01), Huibers et al.
patent: 10300962 (1998-11-01), None

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