Radiation imagery chemistry: process – composition – or product th – Regenerating image processing composition – Developer
Patent
1997-08-11
1998-12-29
Le, Hoa Van
Radiation imagery chemistry: process, composition, or product th
Regenerating image processing composition
Developer
430398, G03C 531
Patent
active
058539638
ABSTRACT:
This invention relates to a method for increasing the effective process life and chemical efficiency of use of aqueous-based developer solutions used for chemical development of photoresists such as are used in the printed circuit industry. The activity is maintained by regenerating some of byproducts during the process to active carbonate, by controlled additions of alkaline hydroxide instead if conventional carbonate solution. The pH and thus the development speed can automatically be controlled at any desired constant value. This invention allows simple automation of printed circuit photoresist development, with reduced chemical costs and increased chemical usage efficiency and thus reducing the industrial waste volume.
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patent: 5234796 (1993-08-01), Shimura et al.
patent: 5541027 (1996-07-01), Wuelfing, Jr.
patent: 5695903 (1997-12-01), Elsaeher et al.
Krulik Gerald A.
Singh Rajwant
Applied Chemical Technologies, Inc.
Le Hoa Van
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