Life extension of photoresist developer solutions

Radiation imagery chemistry: process – composition – or product th – Regenerating image processing composition – Developer

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

430398, G03C 531

Patent

active

058539638

ABSTRACT:
This invention relates to a method for increasing the effective process life and chemical efficiency of use of aqueous-based developer solutions used for chemical development of photoresists such as are used in the printed circuit industry. The activity is maintained by regenerating some of byproducts during the process to active carbonate, by controlled additions of alkaline hydroxide instead if conventional carbonate solution. The pH and thus the development speed can automatically be controlled at any desired constant value. This invention allows simple automation of printed circuit photoresist development, with reduced chemical costs and increased chemical usage efficiency and thus reducing the industrial waste volume.

REFERENCES:
patent: 3832453 (1974-08-01), Slovonsky et al.
patent: 5217848 (1993-06-01), Uehara et al.
patent: 5234796 (1993-08-01), Shimura et al.
patent: 5541027 (1996-07-01), Wuelfing, Jr.
patent: 5695903 (1997-12-01), Elsaeher et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Life extension of photoresist developer solutions does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Life extension of photoresist developer solutions, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Life extension of photoresist developer solutions will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1423083

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.