Lid opening/closing system of an airtight container

Details Lid opening/closing system of an airtight container Lid opening/closing system of an airtight container

2006-11-28

2010-06-01

Huson, Gregory L (Department: 3751)

Fluent material handling, with receiver or receiver coacting mea

Diverse fluid containing pressure filling systems involving...

Gas treatment

C141S051000, C141S098000, C206S710000, C414S217000, C414S411000, C414S935000

Reexamination Certificate

active

07726353

ABSTRACT:
A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed, and at the same time, the inert gas is also supplied to an inside of a FOUP. Here, the direction of supply of the inert gas supplied to the inside of the FOUP is such that it does not have a flow component directing toward the gas flow forming the gas curtain. The above-mentioned structure prevents increase over time in a partial pressure of oxidizing gas in the FOUP fixed by a FIMS system in an open state.

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U.S. Appl. No. 12/106,619, filed Apr. 21, 2008, Okabe, et al.

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