Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1996-06-05
1998-06-09
Dang, Thi
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
118715, 118723R, 20429801, H05H 100, C23C 1600
Patent
active
057627487
ABSTRACT:
Replaceable parts for a vacuum chamber including an aluminum lid and a quartz door and shield, are treated to clean and roughen their surfaces to increase adhesion of materials deposited thereon during substrate processing in said chamber, thereby reducing downtime of the equipment. The parts can be chemically cleaned, rinsed to remove the chemicals and dried in a first step; subjected to bead blasting to roughen the surface of the part and improve adhesion thereon of deposited material; in a succeeding step the part be cleaned ultrasonically to remove all loose particles; and in a last step the parts rinsed and dried to remove moisture, prior to packaging or using the part. A novel single-piece machined aluminum lid has an extension wall from a first surface that fits into the door of the chamber, and an overlying portion of said first surface that sealingly engages the door when the lid is closed.
REFERENCES:
patent: 4466872 (1984-08-01), Einbinder
patent: 4491540 (1985-01-01), Larker et al.
patent: 5017439 (1991-05-01), Brar et al.
patent: 5051375 (1991-09-01), Sakata et al.
patent: 5202008 (1993-04-01), Talieh et al.
patent: 5233144 (1993-08-01), Morino et al.
Lee et al, "Adhesion Studies of Magnetron-Sputtered Copper films . . . " 2194, Thin Solid Films, 185 (1990) Feb. No. 1, Lausanne, CH pp. 35-55.
Banholzer Thomas
Marohl Dan
Mintz Donald M.
Tepman Avi
Applied Materials Inc
Dang Thi
Morris Birgit E.
Verplancken Donald
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