Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing
Reexamination Certificate
2007-11-27
2007-11-27
Nghiem, Michael P. (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Measured signal processing
C702S032000, C702S081000, C702S083000, C702S084000, C356S625000, C356S369000, C356S601000, C703S002000, C703S006000
Reexamination Certificate
active
11390798
ABSTRACT:
The accuracy of a library of simulated-diffraction signals for use in optical metrology of a structure formed on a wafer is evaluated by utilizing an identity relationship inherent to simulated diffraction signals. Each simulated diffraction signal contains at least one set of four reflectivity parameters for a wavelength and/or angle of incidence. One of the four reflectivity parameters is selected. A value for the selected reflectivity parameter is determined using the identity relationship and values of the remaining three reflectivity parameters. The determined value for the selected reflectivity parameter is compared to the value in the obtained set of four reflectivity parameters to evaluate and improve the accuracy of the library. The identity relationship can also be used to reduce the data storage in a library.
REFERENCES:
patent: 6943900 (2005-09-01), Niu et al.
patent: 7031894 (2006-04-01), Niu et al.
patent: 7092110 (2006-08-01), Balasubramanian et al.
patent: 2004/0267397 (2004-12-01), Doddi et al.
patent: 2005/0209816 (2005-09-01), Vuong et al.
Bao Junwei
Li Shifang
Liu Wei
Morrison & Foerster / LLP
Nghiem Michael P.
Timbre Technologies, Inc.
Vo Hien
LandOfFree
Library accuracy enhancement and evaluation does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Library accuracy enhancement and evaluation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Library accuracy enhancement and evaluation will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3811996