Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Patent
1998-12-31
2000-08-29
Geist, Gary
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
556 64, C07F 994
Patent
active
061111244
ABSTRACT:
Anhydrous mononuclear Lewis base adducted tris(.beta.-diketonato) bismuth complexes, useful as precursors for chemical vapor deposition of bismuth, for producing Bi-containing films of significantly improved stoichiometry, morphology and functional character, as compared to films obtained from dinuclear tris(.beta.-diketonato) bismuth complexes of the prior art.
REFERENCES:
K.C. Brooks, et al. "Synthesis and Characterization of Volatile Bismuth Beta-Diketonate Compounds for Metal-Organic Chemical Vapor Deposition of Thin Films" Chem. Mater., vol. 4, 1992, pp. 912-916.
A.P. Pisarevskii et al., "Bismuth(III) Beta-Diketonates", Russ. J. of Inorg. Chem., 37(1), 1992, pp. 38-40.
G.K. Fukin, "Crystal and Molecular Strcture of Bismuth Dipavaloylmethanate", Russ. J. of Inorg. Chem., 38(7), 1993, pp. 1118-1123.
CA:129:324600 by Roeder in Integr. Ferroelectr., 21(1-4), pp. 367-379, 1998.
CA:129:103343 by Armelao in Inorg. Chim. Acta 275-276 (1,2), pp. 340-348, 1998.
CA:120:42314 by Fukin lin Zh. Neorg Khim 38(7) pp. 1205-1211, 1993.
CA:121:147729 by Zharkova in Koord Khim 20(2) pp. 101-105, 1994.
Baum Thomas H.
Dubois Raymond H.
Advanced Technology & Materials Inc.
Geist Gary
Vollano Jean F
Zitzmann Oliver A.
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