Level sensor, lithographic apparatus and device...

Details Level sensor, lithographic apparatus and device... Level sensor, lithographic apparatus and device...

2006-12-12

2006-12-12

Wells, Nikita (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S492100, C356S401000

Reexamination Certificate

active

07148494

ABSTRACT:
The invention relates to a level sensor for use in a lithographic apparatus that determines a surface height of a substrate. The level sensor includes an emitter and a receiver, wherein the emitter is arranged to emit a signal directed to a predetermined position on the surface of the substrate, such that the signal is at least partially reflected by the substrate to render a reflected signal. The receiver is arranged to receive at least part of the reflected signal, and the level sensor is arranged to determine the surface height of the substrate with respect to the level sensor based on the emitted and received signal. The signal includes a pressure wave.

REFERENCES:
patent: 3985030 (1976-10-01), Charlton
patent: 56-138217 (1981-10-01), None
patent: 62-272259 (1987-11-01), None
patent: 6-260393 (1994-09-01), None
patent: 11-176727 (1999-07-01), None
patent: 2001-267224 (2001-09-01), None
European Search Report issued in EP Application No. 05112705.8 dated Apr. 19, 2006.

Affiliated with

Also associated with

Rating

Level sensor, lithographic apparatus and device... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Level sensor, lithographic apparatus and device..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Level sensor, lithographic apparatus and device... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3674080