Level sensor for lithographic apparatus

Details Level sensor for lithographic apparatus Level sensor for lithographic apparatus

2007-09-04

2007-09-04

Kim, Robert (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S492100, C250S492200, C250S559290, C250S339010, C250S339060, C356S364000, C356S399000, C356S400000, C356S416000

Reexamination Certificate

active

10864800

ABSTRACT:
A level sensor for a lithographic projection apparatus includes a light source configured to direct light onto a substrate to be measured, a detector configured to detect light reflected from the substrate, and a processor configured to calculate a difference between measurements made with the filter in the first configuration and in the second configuration. The sensor is adjustable between a first configuration, in which the light is given a first property, and a second configuration, in which the light is given a second property. The sensor may include a polarizing filter, such that the first and second properties are different polarization states.

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