Lens system with lens elements arranged in a gas-filled holder a

Details Lens system with lens elements arranged in a gas-filled holder a Lens system with lens elements arranged in a gas-filled holder a

1994-12-21

1997-02-11

Dzierzynski, Paul M.

Optical: systems and elements

Lens

With support

359350, 359809, 359894, 359507, 355 67, G02B 702

Patent

active

056026838

ABSTRACT:
A high-quality lens system (PL) is described, which system is rinsed with a gas having a low refractive index so as to reduce the influence of variations of ambient parameters on the optical behaviour. By adding a very small quantity of ozone to this gas, it is prevented that any deposit will be produced on the lens elements within the lens holder (PLH) as a result of decomposition of organic particles caused by UV radiation and precipitation of the decomposition products.

REFERENCES:
patent: 2478955 (1949-08-01), Vicklund
patent: 4616908 (1986-10-01), King
patent: 4992169 (1991-02-01), Izumiya
patent: 5100237 (1992-03-01), Wittekoek et al.
patent: 5144363 (1992-09-01), Wittekoek et al.
patent: 5191200 (1993-03-01), van der Werf et al.
patent: 5344522 (1994-09-01), Yagi et al.
H. L. Stover, "Optical Microlithography IV", Proceedings of SPIE--The International Society for Optical Engineering, vol. 538, Mar. 13-14, 1985, pp. 86-90.

Affiliated with

Also associated with

Rating

Lens system with lens elements arranged in a gas-filled holder a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lens system with lens elements arranged in a gas-filled holder a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lens system with lens elements arranged in a gas-filled holder a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-346773