Lens system for scanning laser apparatus

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21912174, 21912175, B23K 2608

Patent

active

054019346

ABSTRACT:
A lens system for a laser scanning apparatus which incorporates two transfer lenses in tandem. The transfer lenses include angular reflecting mirrors, correction lenses, and concave mirrors. The transfer lenses are located between the projection mask and the target of the scanning apparatus wherein the laser beam passed through the projection mask is reflected by an angularly disposed mirror through the first correction lens onto the first concave mirror where it is reflected back through the first correction lens and onto another angularly disposed mirror where the beam is sent to and back from the second concave mirror through the second correction lens and then onto the target.

REFERENCES:
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patent: 4315130 (1982-02-01), Inagaki et al.
patent: 4661679 (1987-04-01), Pardee
patent: 4822975 (1989-04-01), Torigoe
patent: 5109149 (1992-04-01), Leung
patent: 5159172 (1972-10-01), Goodman et al.
Unit Magnification Optical System without Seidel Abberrations, J. Dyson, Journal of the Optical Society of America, vol. 49, Nov. 7, Jul. 59, pp. 713-716.

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