Lens structure, optical system having the same, and...

Details Lens structure, optical system having the same, and... Lens structure, optical system having the same, and...

2011-06-28

2011-06-28

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07969555

ABSTRACT:
Disclosed are a lens structure, an optical system including the same, and a lithography method using the optical system. The disclosed lens structure includes: a lens that has a substantially semispherical shape and includes a protruding portion having a truncated cone shape that is provided on its aspherical surface; a thin metal film that is formed on the surface of the protruding portion, and has an aperture formed at a position corresponding to the center of an upper surface of the protruding portion; and an immersion layer that is formed with a constant thickness on the upper surface of the protruding portion.

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Shi, Xiaolei, A Nano-aperture with 1000x Power Throughput Enhancement for Very Small Aperture Laser System (VSAL), Optical Data Storage 2001, pp. 320-327, Proc. SPIE vol. 4342.

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