Lens for depositing target material on a substrate

Details Lens for depositing target material on a substrate Lens for depositing target material on a substrate

1995-02-03

1996-09-17

Sugarman, Scott J.

Optical: systems and elements

Lens

Including a nonspherical surface

359708, G02B 1318, G02B 308

Patent

active

055574718

ABSTRACT:
A method of depositing a thin layer of a target material on a substrate is disclosed. The method comprises illuminating the material with at least one elliptical laser beam so that a desposition plume is emitted from the target material, then positioning the substrate to receive the material emitted by the deposition plume. An apparatus for practicing the method and a multi-faceted negative axicon for forming a plurality of concentric laser beams are also disclosed.

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