Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1997-03-06
1998-10-27
Font, Frank G.
Optics: measuring and testing
By particle light scattering
With photocell detection
356360, 359654, 359794, G01B 902
Patent
active
058284532
ABSTRACT:
A method for designing an objective lens apparatus formed by at least two lenses, a first lens and a second lens, which includes the steps of: measuring aberration which occurs when a light beam is converged by the first lens; setting the first lens is set such that the aberration occurring in the first lens satisfies Marechal's criterion, in accordance with the measurement results; measuring aberration which occurs when a light beam is converged by the first lens and the second lens; and setting the second lens such that the aberrations occurring in the first lens and the second lens satisfy Marechal's criterion, in accordance with the measurement results. Accordingly, an objective lens apparatus with a small aberration and a large numerical aperture NA can be designed by this method.
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Ichimura Isao
Maeda Fumisada
Ohsato Kiyoshi
Watanabe Toshio
Yamamoto Kenji
Font Frank G.
Kananen Ronald P.
Nguyen Tu T.
Sony Corporation
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