Lens array photolithography

Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying

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355 53, G03B 2768, G03B 2742

Patent

active

06016185&

ABSTRACT:
An apparatus and method for photolithographic exposure of a substrate including an illumination source for providing light for producing an image on the substrate, a mask including a pattern for projection onto the substrate, a lens assembly for projecting the light through a plurality of lens channels onto the substrate and an actuator for moving the lens assembly in a plane parallel to the mask and the substrate for suppressing interference effects.

REFERENCES:
patent: 3610752 (1971-10-01), Wilson
patent: 4023126 (1977-05-01), Schlafer
patent: 4474459 (1984-10-01), Tokumaru
patent: 4621892 (1986-11-01), Kataoka
patent: 4640573 (1987-02-01), Kataoka et al.
patent: 4851882 (1989-07-01), Takahashi et al.
patent: 5153437 (1992-10-01), Nishii et al.
patent: 5337097 (1994-08-01), Suzuki et al.
patent: 5517279 (1996-05-01), Hugle et al.
patent: 5546139 (1996-08-01), Bacs, Jr. et al.
patent: 5661546 (1997-08-01), Taniguchi et al.
patent: 5686960 (1997-11-01), Sussman et al.
patent: 5742376 (1998-04-01), Makinouchi
Volkel et al., "Microlens array imaging system for photolithography," Opt. Eng. vol. 35, No. 11, Nov. 1996, pp. 3323-3330.

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