Lens array photolithography

Details Lens array photolithography Lens array photolithography

1997-10-23

2000-01-18

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

355 53, G03B 2768, G03B 2742

Patent

active

06016185&

ABSTRACT:
An apparatus and method for photolithographic exposure of a substrate including an illumination source for providing light for producing an image on the substrate, a mask including a pattern for projection onto the substrate, a lens assembly for projecting the light through a plurality of lens channels onto the substrate and an actuator for moving the lens assembly in a plane parallel to the mask and the substrate for suppressing interference effects.

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Volkel et al., "Microlens array imaging system for photolithography," Opt. Eng. vol. 35, No. 11, Nov. 1996, pp. 3323-3330.

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