Length measuring machine and method using laser beams

Details Length measuring machine and method using laser beams Length measuring machine and method using laser beams

1998-10-09

2000-03-07

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, 356361, G01B 902

Patent

active

060347732

ABSTRACT:
There is provided a length measuring machine which is not influenced by fluctuations of air or changes in temperature. At a structure, graduations are formed in a longitudinal direction, and further a built-in light wave interferometer is provided. The built-in light wave interferometer measures a length of the structure and supplies the data to a current controller. In order to reconcile a length of the structure with a nominal value, the current controller supplies current to an electrical resistor provided at the structure to cause thermal expansion of the structure, or the structure is cooled.

REFERENCES:
patent: 5141318 (1992-08-01), Miyazaki et al.
patent: 5483343 (1996-01-01), Iwamoto et al.

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