Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1984-07-06
1987-02-17
McGraw, Vincent P.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356363, G01B 902
Patent
active
046435778
ABSTRACT:
Length measuring apparatus with position sensor (12), in accordance with the dual beam laser interferometer principle, having a laser light source (16) supplied by a power source (48), a beam splitter (18) disposed in its optical axis for dividing the light beam into a measuring light beam and a reference light beam aligned at an angle thereto, a movable mirror (19) joined to the position sensor and reflecting the measuring light beam parallel to the optical axis with a transverse offset, and an at least partially reflecting additional optical element (20). This optical element (20) can be either in the form of a second mirror or in the form of a second beam splitter. In the area of interference of the beam paths lies at least one photodetector (21) whose output or outputs are connected to an evaluating circuit (37) which has a counting system for counting the light/dark sequences including a detection of direction of movement, and to a digital display system (3). In accordance with the invention, the laser light source is a laser diode (16 ) for the production of laser light which is essentially monomodal both laterally, transversely and longitudinally and has a coherence length that corresponds at least to the length to be measured. The evaluation circuit (37) also has at least one system for eliminating the influences of operational and environmental parameters of the length measuring apparatus. The apparatus is extraordinarily compact, and easy to learn to operate as regards signal processing and regulation. It is consequently suitable both for manual measuring devices (gauges) and for machine devices.
REFERENCES:
patent: 3588254 (1971-06-01), Rhoades
patent: 3661463 (1972-05-01), Brainard et al.
patent: 4311390 (1982-01-01), Phillips
Roth Rudolf
Werckmeister Claus
Koren Matthew W.
McGraw Vincent P.
Wero Ohg Roth & Co.
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