Led array with stacked driver circuits and methods of manfacture

Details Led array with stacked driver circuits and methods of manfacture Led array with stacked driver circuits and methods of manfacture

1997-03-20

1998-08-04

Meier, Stephen

Active solid-state devices (e.g., transistors, solid-state diode

Incoherent light emitter structure

Plural light emitting devices

257 83, 257 84, H01L 3300, H01L 2715, H01L 3112, H01L 31153

Patent

active

057897662

ABSTRACT:
A method of fabricating an LED array and stacked driving circuitry includes sequentially forming layers of material on the surface of a substrate, the layers cooperating to emit light when activated. An insulating layer is positioned on the layers and divided into LEDs arranged in an array of rows and columns. Row and column driver circuits are formed on the insulating layer overlying the array by patterning portions of recrystallized amorphous silicon on the insulating layer, depositing a gate insulator layer and a gate metal layer on each of the portions to form an MOS gate, implanting a source and drain in each of the portions, using the MOS gate as a self-aligned mask, and forming contacts for the power terminals and the MOS gate, and coupling each LED in the array to the row and column driver circuits.

REFERENCES:
patent: 5357121 (1994-10-01), Miyashita et al.
patent: 5583350 (1996-12-01), Norman et al.

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