LED array alignment mark, method and mask for forming same, and

Details LED array alignment mark, method and mask for forming same, and LED array alignment mark, method and mask for forming same, and

1999-06-11

2000-02-08

Chaudhuri, Olik

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

257 88, 438401, H01L 23544

Patent

active

060231041

ABSTRACT:
An alignment mark on a light-emitting diode (LED) array chip is formed together with the light-emitting areas of the diodes in the array, by use of a combined mask having a first part and a second part. An impurity is introduced through windows in the first part to form the light-emitting areas. Next the windows are covered with an etching resist, and the chip substrate is etched to create a topographic relief feature defined by the second part of the mask. This topographic relief feature is used as an alignment mark. When LED array chips having these alignment marks are mounted on a supporting surface, they are aligned by recognizing patterns of light reflected from the topographic relief, thereby detecting the positions of the alignment marks.

REFERENCES:
patent: 4884086 (1989-11-01), Kirk et al.
patent: 5042709 (1991-08-01), Cina et al.
patent: 5173759 (1992-12-01), Murano
patent: 5554251 (1996-09-01), Watanabe et al.
patent: 5606181 (1997-02-01), Sukama et al.

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