Leak detection system

Measuring and testing – With fluid pressure – Leakage

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G01M 320

Patent

active

048934976

ABSTRACT:
A leak-detection system for vacuum vessels and containers. A probe gas, such as helium, is detected flowing out of leaks in the vacuum vessel by directing such leaks to the exhaust of a molecular drap pump providing a high vacuum to a mass spectrometer's detection chamber. The probe gas is injected with dynamic flow having turbulent, laminar and transitional flow-characteristics. The helium flows rearwardly through the molecular drag pump by the process of cavitation and dynamic mixing until it is tranformed into molecular flow and directed to the detection chamber of the mass spectrometer for detection. A series of support pumps back up the molecular drag pump, between any two of which gross probe gas leaks may be introduced. The system of the invention has application to pure gas separation of one gas from a heavier gas.

REFERENCES:
patent: 4785666 (1988-11-01), Bergquist
Jan., 1988, "Physics Today", p. 2 Advertisement.
Alcatel Vacuum Products Advertisement.
Veeco Advertisement for its MS-20 Leak Detector.
Veeco Instruments, Inc. Brochure on Leak Detectors.
Balsers Advertisement on its HLT 100 Leak Detector.
Inficon Brochure on its UL 100 Leak Detector.
Leybold-Heraeus, Inc. Leak Detection Equipment and Accessories Brochure.
Inficon Ultratest M2ST Helium Sniffer Leak Detector.
Thomas Industries, Inc. Brochures on Model Numbers 2107CA; 2107CB; 2107CD; 004 CA 33; 004 CD 33; 004 CD 33M and 004 CC 33.
1987 American Vacuum Society, Jul./Aug., 1987 article, "Will Tomorrow's High-Vacuum Pumps be Universal or Highly Specialized?".
"Optimization of Molecular Drag Pumps", by Louis Maurice.
Alcatel MDP 5010 (Molecular Drag Pump).

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