Leak detection method and apparatus for plasma processing equipm

Details Leak detection method and apparatus for plasma processing equipm Leak detection method and apparatus for plasma processing equipm

1996-08-19

1998-08-04

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

G01N 2173

Patent

active

057897549

ABSTRACT:
In one aspect, a method of detecting leaks of external atmospheric gases into a plasma reactor comprises monitoring an emission spectra of a plasma within the reactor for the presence of an external atmospheric constituent. In another aspect, a method of detecting an external atmospheric leak in a plasma enhanced reactor comprising detecting photon emission of excited nitrogen present within the reactor. In yet another aspect, a leak detection system of continuously detecting for leaks of external atmospheric gases into a plasma reactor comprises: a) an optical detection apparatus in optical communication with a plasma in the plasma reactor; b) the optical detection apparatus being configured to monitor an emission spectra of the plasma for a signal due to presence of an external atmospheric constituent within the plasma and for a signal due to a non-atmospheric constituent within the plasma; and c) an alarm configured to generate a response when the relative size of the external atmospheric constituent signal to the non-atmospheric constituent signal exceeds a predetermined value.

REFERENCES:
patent: 5326975 (1994-07-01), Barna

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